Langmuirprobe相关论文
Fast-sweeping Langmuir probes:what happens to the Ⅰ-Ⅴ trace when sweeping frequency is higher than t
Limited particle transit time is one of several limiting factors which determine the maximum temporal resolution of a La......
Hydrogen plasma induced crystallization of Si∶H thin films by remote inductive coupled plasma source
Hydrogenated microcrystalline silicon thin films (μc-Si∶H) were deposited by remote inductive coupled plasma (ICP) ass......
The physics mechanism of the low (L) to high (H) confinement transition in toroidal plasmas has been a long term focus a......
Inductively coupled hydrogen plasmas are widely utilized in a broad range of technology areas including fusion,negative ......
An inductively coupled plasma (ICP) system in which a remote ICP (expansion region) with large volume is attached to a m......
Virtual instrument based harmonic technique of probe for plasma diagnosis in insulative film deposit
The harmonic technique of probe has the advantage of being used for plasma diagnosis in insulative film deposition circu......
Langmuir probes are the most attractive and widely used tools for measuring plasma potential.The conventional technique ......
Machine learning combined with Langmuir probe measurements for diagnosis of dusty plasma of a positi
This paper reports the use of machine learning to enhance the diagnosis of a dusty plasma.Dust in a plasma has a large i......
The use of a Langmuir probe to measure the plasma parameters requires that the disturbance caused by the probe be lo......
等离子体诊断技术对于高密度等离子刻蚀过程的监控显得非常重要.讨论了几种主要的等离子体诊断技术:langmuir探针,发射光谱法(OES)......
